Ultra-Compact Fourier Transform Near-Infrared MEMS Spectral Sensor for Smart Industry and IoT
Mortada, B; Medhat, M; Sabry, YM; El-Masry, M; Nada, Y; Anwar, M; Al Haron, MH; Khalil D; Bourouina T.; Gad, M.A.; Garamoon, Hassan; Shebl A.; Sadek, M. F.; Saadany B.;
Abstract
Miniaturized spectrometers are being developed in the recent few years leveraging the rapidly-progressing technology and triggering new markets in the field of on-site and mobile spectroscopic analysis. Although some devices were commercialized for the near-infrared spectroscopy (NIRS), their size and cost still don't meet the requirements for the ubiquitous deployment of the spectrometer as a spectral sensor needed for the smart industry and IoT applications. In this work we report an integrated microelectromechanical system (MEMS)-based Fourier Transform Infrared (FT-IR) spectral sensor. A monolithic scanning Michelson interferometer MEMS chip and an extended InGaAs photodetector chip are integrated with a micro-optical system in a tiny package with a footprint of 18 mm, presenting the smallest reported FT-IR solution to date. A compact light source head is designed and implemented targeting diffuse-reflection applications. The reported sensor's spectral resolution is about 66.6 cm-1 across the spectral range of 1350-2550 nm. The signal-to-noise ratio (SNR) achieved is 8000:1 at 2400 nm in 2 seconds, with an order of magnitude improvement with respect to previously reported fiber-coupled solution. The presented solution provides a low cost, low power, wide wavelength range NIR spectral sensor that can be manufactured with high volumes leveraging economies of scale.
Other data
Title | Ultra-Compact Fourier Transform Near-Infrared MEMS Spectral Sensor for Smart Industry and IoT | Authors | Mortada, B; Medhat, M; Sabry, YM; El-Masry, M; Nada, Y; Anwar, M; Al Haron, MH; Khalil D ; Bourouina T.; Gad, M.A.; Garamoon, Hassan; Shebl A.; Sadek, M. F.; Saadany B. | Keywords | Fourier transform spectrometer; MEMS optical bench technology; Michelson interferometer; spectroscopy; smart industry | Issue Date | 2021 | Publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | Journal | IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS | ISSN | 1077-260X | DOI | 10.1109/JSTQE.2021.3091375 | Scopus ID | 2-s2.0-85110716308 | Web of science ID | WOS:000688320500001 |
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