In-plane external fiber fabry-perot cavity comprising silicon micromachined concave mirror

Sabry, Y.M.; Khalil D; Saadany B.; Bourouina T.;

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Title In-plane external fiber fabry-perot cavity comprising silicon micromachined concave mirror
Authors Sabry, Y.M.; Khalil D ; Saadany B.; Bourouina T.
Issue Date 2014
Journal Journal of Micro/Nanolithography, MEMS, and MOEMS 
DOI 10.1117/1.JMM.13.1.011110
Scopus ID 2-s2.0-84890685351

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