Combined MEMS spectrometer based on Michelson interferometer and tunable filter for wideband selective operation

Shaheen, A.K.; Sabry, Y.M.; Khalil D;

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Title Combined MEMS spectrometer based on Michelson interferometer and tunable filter for wideband selective operation
Authors Shaheen, A.K.; Sabry, Y.M.; Khalil D 
Keywords Spectral resolution;Fabry Perot tunable filter;MEMS FTIR spectrometer
Issue Date 2020
Publisher SPIE-INT SOC OPTICAL ENGINEERING
Journal Proceedings of SPIE - The International Society for Optical Engineering 
ISSN 1996756X 0277786X
DOI 10.1117/12.2542938
Scopus ID 2-s2.0-85084172377
Web of science ID WOS:000576670600012

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