Combined MEMS spectrometer based on Michelson interferometer and tunable filter for wideband selective operation
Shaheen, A.K.; Sabry, Y.M.; Khalil D;
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Title | Combined MEMS spectrometer based on Michelson interferometer and tunable filter for wideband selective operation | Authors | Shaheen, A.K.; Sabry, Y.M.; Khalil D | Keywords | Spectral resolution;Fabry Perot tunable filter;MEMS FTIR spectrometer | Issue Date | 2020 | Publisher | SPIE-INT SOC OPTICAL ENGINEERING | Journal | Proceedings of SPIE - The International Society for Optical Engineering | ISSN | 1996756X 0277786X | DOI | 10.1117/12.2542938 | Scopus ID | 2-s2.0-85084172377 | Web of science ID | WOS:000576670600012 |
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