Deeply-etched 1 micron-thick silicon layers enabling 170-NM bandwidth highly-reflective Bragg mirrors

Omran, H.; Sabry, V.M.; Khalil D; Garamoon, Hassan;

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Title Deeply-etched 1 micron-thick silicon layers enabling 170-NM bandwidth highly-reflective Bragg mirrors
Authors Omran, H.; Sabry, V.M.; Khalil D ; Garamoon, Hassan
Issue Date 2014
Journal International Conference on Optical MEMS and Nanophotonics 
DOI 10.1109/OMN.2014.6924559
Scopus ID 2-s2.0-84908032481

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