Theoretical and experimental analysis of the fabrication tolerance on deeply etched silicon/air Bragg micromirrors
Ali, M.N.; Sabry, Y.M.; Khalil D; Bourouina T.; Marty F.; Khalil, Diaa;
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| Title | Theoretical and experimental analysis of the fabrication tolerance on deeply etched silicon/air Bragg micromirrors | Authors | Ali, M.N.; Sabry, Y.M.; Khalil D ; Bourouina T.; Marty F.; Khalil, Diaa | Issue Date | 2017 | Journal | National Radio Science Conference, NRSC, Proceedings | DOI | 10.1109/NRSC.2017.7893510 | Scopus ID | 2-s2.0-85018432958 |
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