MEMS FTIR spectrometer with enhanced resolution for low cost gas sensing in the NIR
Samir, I.; Sabry, Y.M.; Erfan, M.; Badra, N.; Khalil D;
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| Title | MEMS FTIR spectrometer with enhanced resolution for low cost gas sensing in the NIR | Authors | Samir, I.; Sabry, Y.M.; Erfan, M.; Badra, N.; Khalil D | Keywords | MEMS actuator;super resolution;Handheld spectrometer;optical MEMS;gas detection;environmental sensing;SPECTRUM ANALYSIS; IR;QUANTITATIVE-ANALYSIS | Issue Date | 2018 | Publisher | SPIE-INT SOC OPTICAL ENGINEERING | Journal | Proceedings of SPIE - The International Society for Optical Engineering | ISSN | 0277-786X | DOI | 10.1117/12.2288996 | Scopus ID | 2-s2.0-85049501908 | Web of science ID | WOS:000453745500012 |
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