Ultra wide band MIR MEMS FTIR spectrometer

Ghoname, A.O.; Sabry, Y.M.; Anwar, M.; Khalil D; Saadany B.; Bohlega, Saeed A;

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Title Ultra wide band MIR MEMS FTIR spectrometer
Authors Ghoname, A.O.; Sabry, Y.M.; Anwar, M.; Khalil D ; Saadany B.; Bohlega, Saeed A
Keywords MIR spectroscopy; Miniaturized spectrometer; Micro-optics; Polystyrene calibration film
Issue Date 2019
Publisher SPIE-INT SOC OPTICAL ENGINEERING
Journal Proceedings of SPIE - The International Society for Optical Engineering 
ISSN 0277-786X
DOI 10.1117/12.2509378
Scopus ID 2-s2.0-85068093893
Web of science ID WOS:000482013500027

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