Yield analysis of optical MEMS assembly process using a Monte Carlo simulation technique

Badreldin, T.; Saad, T.; Khalil, Diaa;

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Title Yield analysis of optical MEMS assembly process using a Monte Carlo simulation technique
Authors Badreldin, T.; Saad, T.; Khalil, Diaa 
Keywords 2 x 2 switch; design for manufacturability; Monte Carlo simulation; optical microelectromechanical systems (MEMS); process capability; FIBERS
Issue Date 2005
Publisher IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Journal Journal of Lightwave Technology 
ISSN 0733-8724
DOI 10.1109/JLT.2004.842301
Scopus ID 2-s2.0-15744364905
Web of science ID WOS:000227392900006

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