Attenuated total reflection (ATR) MEMS FTIR spectrometer
Ghoname, A.O.; Sabry, Y.M.; Anwar, M.; Khalil, Diaa;
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| Title | Attenuated total reflection (ATR) MEMS FTIR spectrometer | Authors | Ghoname, A.O.; Sabry, Y.M.; Anwar, M.; Khalil, Diaa | Keywords | Miniaturized ATR spectrometer; Micro-optics; ATR crystal; Photonic MEMS; Lubricant oil | Issue Date | 2020 | Publisher | SPIE-INT SOC OPTICAL ENGINEERING | Journal | Proceedings of SPIE - The International Society for Optical Engineering | ISSN | 1996756X 0277786X | DOI | 10.1117/12.2546012 | Scopus ID | 2-s2.0-85084189589 | Web of science ID | WOS:000576670600020 |
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