Miniaturized tunable integrated Mach-Zehnder MEMS interferometer for spectrometer applications
Khalil, Diaa; Omran, H.; Medhat, M.; Saadany B.;
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| Title | Miniaturized tunable integrated Mach-Zehnder MEMS interferometer for spectrometer applications | Authors | Khalil, Diaa ; Omran, H.; Medhat, M.; Saadany B. | Issue Date | 2010 | Journal | Proceedings of SPIE - The International Society for Optical Engineering | DOI | 10.1117/12.843658 | Scopus ID | 2-s2.0-77951521406 |
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