Environmental mid-infrared gas sensing using MEMS FTIR spectrometer
Erfan, M.; Elsayed, A.A.; Sabry, Y.M.; Mortada, B.; Khalil, Diaa; Sharaf K.;
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| Title | Environmental mid-infrared gas sensing using MEMS FTIR spectrometer | Authors | Erfan, M.; Elsayed, A.A.; Sabry, Y.M.; Mortada, B.; Khalil, Diaa ; Sharaf K. | Keywords | Carbon dioxide (CO2); Deep Reactive Ion Etching (DRIE); Gas absorption spectrum; MIR Spectroscopy; Portable spectrometer | Issue Date | 2017 | Publisher | SPIE-INT SOC OPTICAL ENGINEERING | Journal | Proceedings of SPIE - The International Society for Optical Engineering | ISSN | 0277-786X | DOI | 10.1117/12.2251345 | Scopus ID | 2-s2.0-85018900870 | Web of science ID | WOS:000404905500020 |
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