Optical characterization technique for MEMS comb-drive resonators
Medhat, M.; Khalil, Diaa; Saadany B.; safwat, Amr;
Abstract
A novel optical technique is proposed for the characterization of MEMS resonators. The proposed technique is based on measuring the response of the resonator (resonance frequency and quality factor) optically, which eliminates the electrical parasitic effects. The proposed technique was applied to a comb-drive resonator and the obtained results show good agreement with the standard electrical technique with 2-5% deviation in the resonance frequency and 2-10% in the quality factor. ©2009 IEEE.
Other data
| Title | Optical characterization technique for MEMS comb-drive resonators | Authors | Medhat, M.; Khalil, Diaa ; Saadany B.; safwat, Amr | Keywords | Comb-drive resonator | Fabry-Pérot interferometer | MEMS resonator | Optical characterization | Quality factor | Resonance frequency | Issue Date | 2009 | Journal | 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 | ISBN | 9781424423828 | DOI | 10.1109/OMEMS.2009.5338564 | Scopus ID | 2-s2.0-71749103330 |
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