Silicon multi-pass gas cell for chip-scale gas analysis by absorption spectroscopy
Fathy, A.; Sabry, Y.M.; Gnambodoe-Capochichi, M.; Khalil, Diaa; Marty F.; Bourouina T.;
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| Title | Silicon multi-pass gas cell for chip-scale gas analysis by absorption spectroscopy | Authors | Fathy, A.; Sabry, Y.M.; Gnambodoe-Capochichi, M.; Khalil, Diaa ; Marty F.; Bourouina T. | Issue Date | 2020 | Journal | Micromachines | ISSN | 2072666X | DOI | 10.3390/MI11050463 | Scopus ID | 2-s2.0-85084933005 |
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