Enhanced resolution MEMS spectrometer based on FTIR technique combined with reflection-type etalon
Shaheen, A.K.; Sabry, Y.M.; Khalil, Diaa;
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| Title | Enhanced resolution MEMS spectrometer based on FTIR technique combined with reflection-type etalon | Authors | Shaheen, A.K.; Sabry, Y.M.; Khalil, Diaa | Issue Date | 2020 | Journal | Proceedings of SPIE - The International Society for Optical Engineering | ISSN | 1996756X 0277786X | DOI | 10.1117/12.2555565 | Scopus ID | 2-s2.0-85090389221 |
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