Mach-Zehnder MEMS interferometer with two Si/Air beam splitters
Omran, H.; Medhat, M.; Khalil, Diaa; Saadany B.;
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| Title | Mach-Zehnder MEMS interferometer with two Si/Air beam splitters | Authors | Omran, H.; Medhat, M.; Khalil, Diaa ; Saadany B. | Issue Date | 2009 | Journal | 2009 4th International Design and Test Workshop, IDT 2009 | DOI | 10.1109/IDT.2009.5404129 | Scopus ID | 2-s2.0-77950426005 |
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