MEMS tunable-finesse slotted micromirror resonator
Othman, M.A.; Sabry, Y.M.; Nassar, I.M.; Khalil, Diaa; Sadek, M. F.;
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| Title | MEMS tunable-finesse slotted micromirror resonator | Authors | Othman, M.A.; Sabry, Y.M.; Nassar, I.M.; Khalil, Diaa ; Sadek, M. F. | Keywords | Deep Reactive Ion Etching (DRIE); Fabry-Perot; Micro-optical bench; Tunable filter; FABRY-PEROT | Issue Date | 2018 | Publisher | SPIE-INT SOC OPTICAL ENGINEERING | Journal | Proceedings of SPIE - The International Society for Optical Engineering | ISSN | 0277-786X | DOI | 10.1117/12.2291391 | Scopus ID | 2-s2.0-85049501637 | Web of science ID | WOS:000453745500034 |
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