Ultra-compact MEMS FTIR spectrometer
Sabry, Y.M.; Anwar, M.; Alharon, M.H.; Medhat, M.; Adib, G.A.; Dumont, R.; Khalil, Diaa; Khalil, Diaa; Garamoon, Hassan;
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Title | Ultra-compact MEMS FTIR spectrometer | Authors | Sabry, Y.M.; Anwar, M.; Alharon, M.H.; Medhat, M.; Adib, G.A.; Dumont, R.; Khalil, Diaa ; Khalil, Diaa ; Garamoon, Hassan | Keywords | Spectroscopy; IoT; Microoptics; Portable spectrometers; Silicon photonics | Issue Date | 2017 | Publisher | SPIE-INT SOC OPTICAL ENGINEERING | Journal | Proceedings of SPIE - The International Society for Optical Engineering | ISSN | 0277-786X | DOI | 10.1117/12.2268078 | Scopus ID | 2-s2.0-85025138002 | Web of science ID | WOS:000432485500008 |
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