Ultra-compact MEMS FTIR spectrometer

Sabry, Y.M.; Anwar, M.; Alharon, M.H.; Medhat, M.; Adib, G.A.; Dumont, R.; Khalil, Diaa; Khalil, Diaa; Garamoon, Hassan;

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Title Ultra-compact MEMS FTIR spectrometer
Authors Sabry, Y.M.; Anwar, M.; Alharon, M.H.; Medhat, M.; Adib, G.A.; Dumont, R.; Khalil, Diaa ; Khalil, Diaa ; Garamoon, Hassan
Keywords Spectroscopy; IoT; Microoptics; Portable spectrometers; Silicon photonics
Issue Date 2017
Publisher SPIE-INT SOC OPTICAL ENGINEERING
Journal Proceedings of SPIE - The International Society for Optical Engineering 
ISSN 0277-786X
DOI 10.1117/12.2268078
Scopus ID 2-s2.0-85025138002
Web of science ID WOS:000432485500008

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