MEMS tunable Michelson interferometer with robust beam splitting architecture
Omran, H.; Medhat, M.; Khalil D; Marty F.; Saadany B.; Bourouina T.;
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Title | MEMS tunable Michelson interferometer with robust beam splitting architecture | Authors | Omran, H.; Medhat, M.; Khalil D ; Marty F.; Saadany B.; Bourouina T. | Issue Date | 2009 | Journal | 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 | DOI | 10.1109/OMEMS.2009.5338601 | Scopus ID | 2-s2.0-71749111188 |
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