Modeling and characterization of the reflectance of vertical metal-coated micromirrors in deeply-etched optical benches
El-Massry, M.; Sabry, Y.M.; Nazeer, S.; Khalil, Diaa; Shebl A.;
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| Title | Modeling and characterization of the reflectance of vertical metal-coated micromirrors in deeply-etched optical benches | Authors | El-Massry, M.; Sabry, Y.M.; Nazeer, S.; Khalil, Diaa ; Shebl A. | Keywords | Vertical micromirrors; aluminum reflectivity; transfer matrix method; metal thin film grains | Issue Date | 2020 | Publisher | SPIE-INT SOC OPTICAL ENGINEERING | Journal | Proceedings of SPIE - The International Society for Optical Engineering | ISSN | 1996756X 0277786X | DOI | 10.1117/12.2544850 | Scopus ID | 2-s2.0-85084189930 | Web of science ID | WOS:000576670600019 |
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