Design optimization of linearly DC controlled staggered vertical comb drive actuators
Elhady, A.; Khalil, Diaa; Mahmoud, M.A.E.;
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| Title | Design optimization of linearly DC controlled staggered vertical comb drive actuators | Authors | Elhady, A.; Khalil, Diaa ; Mahmoud, M.A.E. | Issue Date | 2015 | Journal | Microsystem Technologies | DOI | 10.1007/s00542-013-1945-2 | Scopus ID | 2-s2.0-84921068323 |
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