All-Silicon Double-Cavity Fourier-Transform Infrared Spectrometer On-Chip

Eltagoury, Y.M.; Sabry, Y.M.; Khalil, Diaa;

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Title All-Silicon Double-Cavity Fourier-Transform Infrared Spectrometer On-Chip
Authors Eltagoury, Y.M.; Sabry, Y.M.; Khalil, Diaa 
Keywords coupled cavities;micro-optical benches;microspectrometers;monolithic interferometers;ubiquitous sensing;MICROSPECTROMETER;RESOLUTION;QUALITY
Issue Date 2019
Publisher WILEY
Journal Advanced Materials Technologies 
Volume 4
Issue 10
ISSN 2365-709X
DOI 10.1002/admt.201900441
Scopus ID 2-s2.0-85070766696
Web of science ID WOS:000481304500001

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