Three-dimensional collimation of in-plane-propagating light using silicon micromachined mirror

Sabry, Y.M.; Khalil, Diaa; Saadany B.; Bourouina T.;

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Title Three-dimensional collimation of in-plane-propagating light using silicon micromachined mirror
Authors Sabry, Y.M.; Khalil, Diaa ; Saadany B. ; Bourouina T. 
Issue Date 2014
Journal Proceedings of SPIE - The International Society for Optical Engineering
DOI 10.1117/12.2038671
Scopus ID 2-s2.0-84900821341

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