Deeply-etched micromirror with vertical slit and metallic coating enabling transmission-type optical MEMS filters
Othman, M.A.; Sabry, Y.M.; Sadek, M. F.; Nassar, I.M.; Khalil, Diaa;
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| Title | Deeply-etched micromirror with vertical slit and metallic coating enabling transmission-type optical MEMS filters | Authors | Othman, M.A.; Sabry, Y.M.; Sadek, M. F. ; Nassar, I.M.; Khalil, Diaa | Issue Date | 2016 | Journal | Proceedings of SPIE - The International Society for Optical Engineering | DOI | 10.1117/12.2211323 | Scopus ID | 2-s2.0-84987608826 |
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