Modeling the field diffracted from photo mask at oblique incidence
Elazhary, T.T.; Morshed, A.H.; Khalil, Diaa;
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| Title | Modeling the field diffracted from photo mask at oblique incidence | Authors | Elazhary, T.T.; Morshed, A.H.; Khalil, Diaa | Issue Date | 2010 | Journal | Applied Optics | DOI | 10.1364/AO.49.004207 | Scopus ID | 2-s2.0-77955907539 |
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