Curved silicon micromirror for linear displacement-to-angle conversion with uniform spot size
Sabry, Y.M.; Khalil, Diaa; Saadany B.; Bourouina T.;
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| Title | Curved silicon micromirror for linear displacement-to-angle conversion with uniform spot size | Authors | Sabry, Y.M.; Khalil, Diaa ; Saadany B. ; Bourouina T. | Issue Date | 2015 | Journal | IEEE Journal on Selected Topics in Quantum Electronics | DOI | 10.1109/JSTQE.2014.2375493 | Scopus ID | 2-s2.0-84920861192 |
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