Characterization of MEMS FTIR spectrometer

Khalil, Diaa; Sabry Y.; Omran, H.; Medhat, M.; Hafez, A.; Saadany B.;

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Title Characterization of MEMS FTIR spectrometer
Authors Khalil, Diaa ; Sabry Y. ; Omran, H.; Medhat, M.; Hafez, A.; Saadany B. 
Issue Date 2011
Journal Proceedings of SPIE - The International Society for Optical Engineering
DOI 10.1117/12.876124
Scopus ID 2-s2.0-79953664317

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