Micro-Electro-Mechanical System Fourier Transform Infrared (MEMS FT-IR) Spectrometer Under Modulated–Pulsed Light Source Excitation

Abstract

Miniaturized Fourier transform infrared (FT-IR) spectrometers suffer from limited optical throughput due to their tiny aperture size. Therefore, coherent wideband sources with high brightness can provide an advantage over the wideband thermal radiation sources. However, the former ones are available based on pulsed operation. In this work, we present and study a miniaturized FT-IR spectrometer with pulsed light sources including chopped thermal source, semiconductor optical amplifier, Q-switched and femtosecond mode-locked laser sources. A system model for the FT-IR spectrometer system under a modulated input light source is presented. The model accounts for the relatively high scanning speed of the micro-electro-mechanical system (MEMS) interferometer. The signal-to-noise ratio of the spectrometer, due to the light source modulation, is calculated at different values of modulation repetition rate ranging from 20 Hz to 2 MHz, and duty cycle values ranging from 1% to 50%. An analytical expression for the worst-case repetition rate for the spectrometer system is derived. The model results are verified by experimental measurements showing good agreement with the theoretical expectations. Spectroscopic measurements for CO2 gas with pressure ranging from 300 mbar to 700 mbar are also performed using a high-repetition rate source, and the measured spectra agree with the simulation results demonstrating the utility of the spectrometer.