MEMS corner-cube transmission-type optical phase modulator in DRIE technology
Khalil, K.; Garamoon, Hassan; Shebl A.; Soliman, M.; Eltagoury, Y.M.; Al-Otaibi, M.; Sabry, Y.M.; Khalil, Diaa;
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| Title | MEMS corner-cube transmission-type optical phase modulator in DRIE technology | Authors | Khalil, K.; Garamoon, Hassan ; Shebl A. ; Soliman, M.; Eltagoury, Y.M.; Al-Otaibi, M.; Sabry, Y.M.; Khalil, Diaa | Issue Date | 2014 | Journal | International Conference on Optical MEMS and Nanophotonics | DOI | 10.1109/OMN.2014.6924566 | Scopus ID | 2-s2.0-84908052402 |
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