RF MEMS resonators: Material properties extraction
Nada, Yasseen; Stoffels, Steve; Tilmans, Harrie A.C.; Hegazi, Emad; Ragai, Hani F.; Shaarawi, Amr M.;
Abstract
Analytical formula for the resonance frequencies of circular, square, and hexagonal MEMS resonators are extracted based on the analytical model for extensional vibrations of MEMS resonators [1]. Material properties for the MEMS resonators are then extracted based on the analytical formula. Experimental measurement is done to extract the material properties of single crystal silicon MEMS resonators to verify the extraction method. ©2009 IEEE.
Other data
| Title | RF MEMS resonators: Material properties extraction | Authors | Nada, Yasseen; Stoffels, Steve; Tilmans, Harrie A.C.; Hegazi, Emad ; Ragai, Hani F.; Shaarawi, Amr M. | Keywords | Material properties;Extensional vibration;RF MEMS;Modeling microsystems;Micro-electro-mechanical resonator | Issue Date | 1-Dec-2009 | Journal | 2009 4th International Design and Test Workshop, IDT 2009 | ISBN | 9781424457489 | DOI | 10.1109/IDT.2009.5404127 | Scopus ID | 2-s2.0-77950424026 |
Recommend this item
Similar Items from Core Recommender Database
Items in Ain Shams Scholar are protected by copyright, with all rights reserved, unless otherwise indicated.