Modeling mask scattered field at oblique incidence
Tawfik, T.M., Morshed, A.H., Khalil, Diaa,
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Title | Modeling mask scattered field at oblique incidence | Authors | Tawfik, T.M.; Morshed, A.H.; Khalil, Diaa | Issue Date | 2009 | Journal | Proceedings of SPIE - The International Society for Optical Engineering | DOI | 10.1117/12.814018 |
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