Modeling mask scattered field at oblique incidence

Tawfik, T.M., Morshed, A.H., Khalil, Diaa,

Other data

Title Modeling mask scattered field at oblique incidence
Authors Tawfik, T.M.; Morshed, A.H.; Khalil, Diaa 
Issue Date 2009
Journal Proceedings of SPIE - The International Society for Optical Engineering
DOI 10.1117/12.814018

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