Mid infrared MEMS FTIR spectrometer
Erfan, M.; Sabry, Y.M.; Mortada, B.; Sharaf K.; Khalil, Diaa;
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Title | Mid infrared MEMS FTIR spectrometer | Authors | Erfan, M.; Sabry, Y.M.; Mortada, B.; Sharaf K. ; Khalil, Diaa | Issue Date | 2016 | Journal | Proceedings of SPIE - The International Society for Optical Engineering | DOI | 10.1117/12.2210973 | Scopus ID | 2-s2.0-84987670094 |
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